Publication:

EUVL at IMEC: shadowing compensation and Flare mitigation

Date

2007-11
Journal article
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Author(s)

Lorusso, Gian  
;
Goethals, Mieke
;
Jonckheere, Rik  
;
Hermans, Jan  
;
Ronse, Kurt  
;
Myers, Alan
;
Kim, In Sung
;
Niroomand, Ardavan
;
Iwamoto, Fumio
;
Ritter, D.

Journal

Journal of Vacuum Science and Technology B

Abstract

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1989 since deposited on 2021-10-16
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Acq. date: 2026-05-30

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