Publication:
SOI n- and pMuGFET devices with different TiN metal gate tThickness under influence of sidewall crystal orientation
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1886 since deposited on 2021-10-19
4last month
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Acq. date: 2026-08-18
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Statistics
Views
1886 since deposited on 2021-10-19
4last month
1last week
Acq. date: 2026-08-18
Citations