Publication:

Top-coats for scalable Nano-manufacturing with High-chi Block Copolymers in Lithographic Applications

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2583717
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Author(s)

Chevalier, Xavier
;
Correia, Cindy Gomez
;
Pound-Lana, Gwenaelle
;
Bezard, Philippe  
;
Serege, Matthieu
;
Petit-Etienne, Camille
;
Gay, Guillaume
;
Cunge, Gilles
;
Cabannes-Boue, Benjamin
;
Nicolet, Celia
;
Navarro, Christophe
;
Cayrefourcq, Ian
;
Mueller, Marcus
;
Hadziioannou, Georges
;
Iliopoulos, Ilias
;
Fleury, Guillaume
;
Zelsmann, Marc

Journal

Proceedings of SPIE

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