Defect investigation of aluminum-induced crystallized silicon thin-films grown on bare and oxidized silicon wafers

Publication:

2010

Meeting abstract

Author(s)

Venkatachalam, Srisaran

;

Van Gestel, Dries

;

;

Qiu, Yu

;

;

1940 since deposited on 2021-10-18

Acq. date: 2026-10-12