Publication:
Ni(Pt) silicide with improved thermal stability for application in DRAM PERI or RMG devices
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1 since deposited on 2021-10-21
Acq. date: 2026-06-05
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1944 since deposited on 2021-10-21
Acq. date: 2026-06-05
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1 since deposited on 2021-10-21
Acq. date: 2026-06-05
Views
1944 since deposited on 2021-10-21
Acq. date: 2026-06-05
Citations