Publication:
Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)
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2313 since deposited on 2021-10-27
27last month
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Acq. date: 2026-10-12
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Statistics
Views
2313 since deposited on 2021-10-27
27last month
8last week
Acq. date: 2026-10-12
Citations