Publication:

Interfacial properties of ZrO2 on silicon

Date

2003
Journal article
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Author(s)

Lin, Y.S.
;
Puthenkovilakam, R.
;
Chang, J.P.
;
Bouldin, C.
;
Levin, I.
;
Nguyen, N.V.
;
Ehrstein, J.
;
Sun, Y.
;
Pianetta, P.
;
Conard, Thierry  
;
Vandervorst, Wilfried  
;
Venturo, V.
;
Selbrede, S.

Journal

Journal of Applied Physics

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1932 since deposited on 2021-10-15
2last month
Acq. date: 2026-06-02

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