Publication:
Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Downloads
1 since deposited on 2021-10-18
Acq. date: 2026-06-04
Views
1894 since deposited on 2021-10-18
1last month
Acq. date: 2026-06-04
Citations
Statistics
Downloads
1 since deposited on 2021-10-18
Acq. date: 2026-06-04
Views
1894 since deposited on 2021-10-18
1last month
Acq. date: 2026-06-04
Citations