Publication:

Fabrication of humidity monitoring sensor using porous silicon nitride structures for alkaline conditions

Date

2024
Journal article
https://doi.org/10.1016/j.snr.2024.100203
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Published version 6.43 MB

Author(s)

Park, Soobin
;
Hwang, Inseong
;
Park, Jae Chan
;
Park, Tae Joo
;
Lee, Han-Seung
;
Lee, Sangyeon  
;
Yang, Hyun-Min
;
Yoo, Bongyoung
;
yeon

Journal

SENSORS AND ACTUATORS REPORTS

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171 since deposited on 2024-07-02
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