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Top-surface imaging and optical proximity correction: a way to 0.18 µm lithography at 248 nm
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1928 since deposited on 2021-09-29
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Acq. date: 2026-10-12
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Statistics
Views
1928 since deposited on 2021-09-29
1last month
1last week
Acq. date: 2026-10-12
Citations