Publication:

Unbiased roughness measurements for 0.55NA EUV material setup

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2658505
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Author(s)

Mathew, Bobin
;
Arad, Shahar
;
Brand, Omri
;
Frank, Tal
;
Alkoken, Ran
;
Shilo, Yael
;
Melamed, Yarden
;
Yosef, Rotem Mor
;
Suh, Hyo Seon  
;
Heo, Seonggil  
;
Halder, Sandip  

Journal

Proceedings of SPIE

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598 since deposited on 2023-07-28
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1091 since deposited on 2023-07-28
Acq. date: 2026-08-20

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