Publication:
Defect generation in ultrathin SiON/ZrO2 gate dielectric stacks
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1929 since deposited on 2021-10-14
2last month
Acq. date: 2026-06-01
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Statistics
Views
1929 since deposited on 2021-10-14
2last month
Acq. date: 2026-06-01
Citations