Publication:
N2 as alternative to H2 as carrier gas in CVD Si-epitaxy; double win-win situation
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1957 since deposited on 2021-10-15
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Acq. date: 2026-10-13
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Statistics
Views
1957 since deposited on 2021-10-15
2last month
Acq. date: 2026-10-13
Citations