Publication:

Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology

Date

2019

Proceedings Paper

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Files

41925.pdf 1.22 MB

Author(s)

Westerveld, Wouter

;

;

;

Huang, Chih-Hsien

;

Verhaegen, Fabian

;

Troia, Benedetto

;

Haouari, Rachid

;

Neutens, Pieter

;

O'Callaghan, John

;

;

Rottenberg, Xavier

;

;

Rochus, Veronique

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2115 since deposited on 2021-10-27

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Acq. date: 2026-10-13