A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

Padovani, Andrea; Kaczer, Ben; Pesic, Milan; Belmonte, Attilio; Popovici, Mihaela Ioana; Nyns, Laura; Linten, Dimitri; Afanasiev, Valeri; Shlyakhov, Ilya; Lee, Younggon; Park, Hokyung; Larcher, Luca

Publication:

A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

Date

2019

Journal article

Simple item page Full metadata Statistics

Files

40699.pdf 2.09 MB

Author(s)

;

;

;

;

Popovici, Mihaela Ioana

;

;

;

;

;

;

;

Journal

IEEE Transactions on Electron Devices

Statistics

1953 since deposited on 2021-10-27

4last month

Acq. date: 2026-10-13

A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations