Publication:
300 mm-wafer characterization of ruthenium area-selective deposition in nanoscale line-space and hole patterns
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2149 since deposited on 2021-10-28
3last month
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Acq. date: 2026-08-15
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Statistics
Views
2149 since deposited on 2021-10-28
3last month
1last week
Acq. date: 2026-08-15
Citations