Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Deng, Kerong; Erofeev, Ivan; Chowdhuri, Angshuman Ray; Philipsen, Harold; Aabdin, Zainul; Hartanto, Antony Winata; Tjiu, Weng Weei; Zhang, Mingsheng; Fernando, Devshan; Saidov, Khakimjon; Kumar, Krishna; Pacco, Antoine; Holsteyns, Frank; Huynh, Han Vinh; Mirsaidov, Utkur

doi:10.1002/smll.202406713

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Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Date

2024

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https://doi.org/10.1002/smll.202406713

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Deng, Kerong

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Erofeev, Ivan

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Chowdhuri, Angshuman Ray

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Philipsen, Harold

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Aabdin, Zainul

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Hartanto, Antony Winata

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SMALL

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4 since deposited on 2024-10-30

Acq. date: 2026-05-28

310 since deposited on 2024-10-30

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Acq. date: 2026-05-28

Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

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