Publication:
A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
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1893 since deposited on 2021-10-21
1last month
Acq. date: 2026-10-13
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Views
1893 since deposited on 2021-10-21
1last month
Acq. date: 2026-10-13
Citations