Publication:

Effect of UV-wavelength on hardening process of porogen-containing and porogen-free ultra-low-k PECVD glasses

Date

2010
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Author(s)

Urbanowicz, Adam
;
Vanstreels, Kris  
;
Verdonck, Patrick  
;
Van Besien, Els  
;
Trompoukis, Christos
;
Shamiryan, Denis
;
De Gendt, Stefan  
;
Baklanov, Mikhaïl

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1956 since deposited on 2021-10-18
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Acq. date: 2026-08-15

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