Publication:

Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow

Date

2014

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Rincon Delgadillo, Paulina

;

Pathangi Sriraman, Hari

;

Van Den Heuvel, Dieter

;

;

;

;

Van Look, Lieve

;

;

;

;

Harukawa, Ryoto

;

Nagaswami, Venkat

;

;

Somervell, Mark

;

Statistics

2044 since deposited on 2021-10-22

4last month

1last week

Acq. date: 2026-10-12