Publication:
Alleviation of Negative-Bias Temperature Instability in Si p-FinFETs With ALD W Gate-Filling Metal by Annealing Process Optimization
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751 since deposited on 2021-11-02
58last month
18last week
Acq. date: 2026-10-13
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1669 since deposited on 2021-11-02
1last month
1last week
Acq. date: 2026-10-13
Citations