Publication:

Direct three-dimensional observation of the conduction in poly-Si and In1-xGaxAs 3D NAND vertical channels

Date

2016

Proceedings Paper

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Files

33410.pdf 1.9 MB

Author(s)

Celano, Umberto

;

Capogreco, Elena

;

;

Arreghini, Antonio

;

Kunert, Bernardette

;

;

Van den Bosch, Geert

;

;

De Meyer, Kristin

;

Furnemont, Arnaud

;

Vandervorst, Wilfried

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Acq. date: 2026-10-13