Publication:
Optimization and stability of CD variability in pitch 40 nm contact holes on NXE:3300
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1898 since deposited on 2021-10-26
4last month
Acq. date: 2026-10-13
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Statistics
Views
1898 since deposited on 2021-10-26
4last month
Acq. date: 2026-10-13
Citations