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Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
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Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
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Date
2023
Journal article
https://doi.org/10.1116/6.0002347
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Dongen, Kaat
;
Nye, Rachel
;
Clerix, Jan-Willem
;
Sixt, Claudia
;
De Simone, Danilo
;
Delabie, Annelies
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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Downloads
518
since deposited on 2023-04-06
80
last month
18
last week
Acq. date: 2026-08-21
Views
1294
since deposited on 2023-04-06
7
last month
4
last week
Acq. date: 2026-08-21
Citations