Publication:

Advances and challenges in ultra low-k patterning

Date

2012

Meeting abstract

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Author(s)

;

Souriau, Laurent

;

Lazzarino, Frederic

;

de Marneffe, Jean-Francois

;

Baklanov, Mikhaïl

;

Boullart, Werner

Statistics

2006 since deposited on 2021-10-20

4last month

Acq. date: 2026-08-17