Publication:
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
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1950 since deposited on 2021-10-14
2last month
Acq. date: 2026-08-17
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Statistics
Views
1950 since deposited on 2021-10-14
2last month
Acq. date: 2026-08-17
Citations