Publication:
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
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1954 since deposited on 2021-10-14
4last month
2last week
Acq. date: 2026-10-12
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Statistics
Views
1954 since deposited on 2021-10-14
4last month
2last week
Acq. date: 2026-10-12
Citations