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Influence of pre and post process conditions on the composition of thin Si3Ni4 thin films (3nm) studied by XPS and TOFSIMS

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1889 since deposited on 2021-10-06
1last month
Acq. date: 2026-06-04

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1889 since deposited on 2021-10-06
1last month
Acq. date: 2026-06-04

Citations