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Atomic layer deposition of HfO2 on (100) and (110) oriented silicon surfaces
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Acq. date: 2026-08-20
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Acq. date: 2026-08-20
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1 since deposited on 2021-10-16
Acq. date: 2026-08-20
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1953 since deposited on 2021-10-16
1last month
Acq. date: 2026-08-20
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