Publication:
Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control
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1 since deposited on 2021-10-23
Acq. date: 2026-06-05
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1953 since deposited on 2021-10-23
Acq. date: 2026-06-05
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1 since deposited on 2021-10-23
Acq. date: 2026-06-05
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1953 since deposited on 2021-10-23
Acq. date: 2026-06-05
Citations