Publication:
Impact of LER on BEOL dielectric reliability: a quantitative model and experimental validation
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1922 since deposited on 2021-10-18
3last month
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Acq. date: 2026-08-17
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Statistics
Views
1922 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-08-17
Citations