Publication:

High-k dielectrics and interface passivation for Ge and III/V devices on silicon for advanced CMOS

Date

2009
Proceedings Paper
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Author(s)

Heyns, Marc  
;
Bellenger, Florence
;
Brammertz, Guy  
;
Caymax, Matty  
;
De Jaeger, Brice  
;
Delabie, Annelies  
;
Eneman, Geert  
;
Houssa, Michel  
;
Lin, Dennis  
;
Martens, Koen  
;
Merckling, Clement  
;
Meuris, Marc  
;
Mitard, Jerome  
;
Penaud, Julien
;
Pourtois, Geoffrey  
;
Scarrozza, Marco
;
Simoen, Eddy  
;
Sioncke, Sonja
;
Van Elshocht, Sven  
;
Wang, Wei-E

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