Publication:

Design method for the integration of DSA via patterning in sub-7 nm circuits

Date

2016
Presentation
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Karageorgos, Ioannis
;
Ryckaert, Julien  
;
Croes, Kris
;
Tung, C. Maryann
;
Wong, H. -S. Philip
;
Karageorgos, Evangelos
;
Gronheid, Roel  
;
Bekaert, Joost  
;
Vandenberghe, Geert  
;
Stucchi, Michele  
;
Dehaene, Wim  

Journal

Abstract

Description

Statistics

Views

1997 since deposited on 2021-10-23
2last month
Acq. date: 2026-05-30

Citations

Statistics

Views

1997 since deposited on 2021-10-23
2last month
Acq. date: 2026-05-30

Citations