Publication:

Development of integrated wet cleans for 3D-SIC technologies

Date

2013
Proceedings Paper
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Author(s)

Suhard, Samuel  
;
Simms, Ihsan
;
Brown, Ian
;
Shogo, Mizota
;
Koji, Kagawa
;
Claes, Martine  
;
Buisson, Thibault
;
Jourdain, Anne  
;
Beyer, Gerald  
;
De Gendt, Stefan  

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