Publication:

Alternative high-k dielectrics for semiconductor applications

Date

2008
Presentation
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Van Elshocht, Sven  
;
Adelmann, Christoph  
;
Clima, Sergiu  
;
Pourtois, Geoffrey  
;
Conard, Thierry  
;
Delabie, Annelies  
;
Franquet, Alexis  
;
Lehnen, Peer
;
Meersschaut, Johan  
;
Menou, Nicolas
;
Popovici, Mihaela Ioana  
;
Richard, Olivier  
;
Schram, Tom  
;
Wang, Xin Peng
;
Hardy, An  
;
Dewulf, Daan
;
van Bael, M.K.
;
Blomberg, T.
;
Pieereux, D.
;
Swerts, J.
;
Maes, J.W.
;
Wouters, Dirk
;
De Gendt, Stefan  
;
Kittl, Jorge

Journal

Abstract

Description

Statistics

Views

2035 since deposited on 2021-10-17
2last month
Acq. date: 2026-05-28

Citations

Statistics

Views

2035 since deposited on 2021-10-17
2last month
Acq. date: 2026-05-28

Citations