Publication:

Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3011279
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Author(s)

Beggiato, Matteo  
;
Cerbu, Dorin  
;
Loo, Roger  
;
Sun, W.
;
Moussa, Alain  
;
Bast, G.
;
Fukaya, K.
;
Beral, Christophe  
;
Charley, Anne-Laure  
;
Janardan, N.
;
Cross, A.
;
Lorusso, Gian  
;
Isawa, M.
;
Belmonte, Attilio  
;
Kar, Gouri Sankar  
;
Bogdanowicz, Janusz  

Journal

Proceedings of SPIE

Abstract

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