Publication:

Correlation between stress-induced leakage current and dielectric degradation in ultra-porous SiOCH low-k materials

Date

2015
Journal article
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Author(s)

Wu, Chen  
;
Li, Yunlong  
;
Lesniewska, Alicja  
;
Varela Pedreira, Olalla  
;
de Marneffe, Jean-Francois  
;
Ciofi, Ivan  
;
Verdonck, Patrick  
;
Baklanov, Mikhaïl
;
Boemmels, Juergen  
;
De Wolf, Ingrid  
;
Tokei, Zsolt  
;
Croes, Kristof  

Journal

Journal of Applied Physics

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1965 since deposited on 2021-10-23
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