Publication:

Mitigating EUV mask 3D effects by alternative metal absorbers

Date

2016

Proceedings Paper

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Author(s)

Philipsen, Vicky

;

;

Hendrickx, Eric

;

Erdmann, Andreas

;

;

Evanschitzky, Peter

;

van de Kruijs, Robbert

;

;

;

Laubis, Christian

;

Irmscher, Mathias

;

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