Publication:

30nm half-pitch metal patterning using MotifTM CD shrink technique and double patterning

Date

2008

Proceedings Paper

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Files

14688.pdf 1.9 MB

Author(s)

Versluijs, Janko

;

de Marneffe, Jean-Francois

;

Goossens, Danny

;

Op de Beeck, Maaike

;

Vandeweyer, Tom

;

;

Struyf, Herbert

;

Maenhoudt, Mireille

;

;

Vertommen, Johan

;

;

;

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