Publication:

Atomic layer deposition of high-k dielectric layers on Ge and III-V MOS channels

Date

2008

Proceedings Paper

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Files

17320.pdf 308.74 KB

Author(s)

Delabie, Annelies

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Bellenger, Florence

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Conard, Thierry

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Franquet, Alexis

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Van Elshocht, Sven

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van Hemmen, J.L.

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Kessels, W.M.M.

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Afanas'ev, V.V.

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Stesmans, Andre

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1985 since deposited on 2021-10-17

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Acq. date: 2026-08-20