Publication:
Rectification of extreme ultraviolet lithography patterns by directed self-assembly: a roughness and defectivity study
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142 since deposited on 2025-01-09
14last month
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Acq. date: 2026-08-21
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Statistics
Views
142 since deposited on 2025-01-09
14last month
7last week
Acq. date: 2026-08-21
Citations