Publication:

Mask 3D effect mitigation by source optimization and assist feature placement

Date

2016

Proceedings Paper

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Author(s)

Van Look, Lieve

;

;

Philipsen, Vicky

;

Gallagher, Emily

;

Hendrickx, Eric

;

;

Wittebrood, Friso

;

Lyakhova, Kateryna

;

de Winter, Laurens

;

;

Fliervoet, Timon

;

Schiffelers, Guido

;

;

Van Adrichem, Paul

;

;

;

;

Neumann, Jens Timo

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