Publication:
Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
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352 since deposited on 2024-10-30
10last month
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Acq. date: 2026-08-17
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Statistics
Views
352 since deposited on 2024-10-30
10last month
3last week
Acq. date: 2026-08-17
Citations