Publication:
Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
Loading...
Journal
Abstract
Description
Statistics
Views
358 since deposited on 2024-10-30
3last month
2last week
Acq. date: 2026-10-13
Citations
Statistics
Views
358 since deposited on 2024-10-30
3last month
2last week
Acq. date: 2026-10-13
Citations