Publication:
A new method to determine the mechanical resonance frequency and charging in electrostatically actuated MEMS
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1931 since deposited on 2021-10-16
3last month
Acq. date: 2026-08-19
Citations
Statistics
Views
1931 since deposited on 2021-10-16
3last month
Acq. date: 2026-08-19
Citations