Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials

Publication:

2014

Journal article

Author(s)

;

;

;

;

;

;

;

Journal of Vacuum Science and Technology B

1878 since deposited on 2021-10-22

2last month

1last week

Acq. date: 2026-10-12