Publication:

III-V fin patterning in SADP scheme

Date

2016

Meeting abstract

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Files

33684.pdf 162.39 KB

Author(s)

Milenin, Alexey

;

Camerotto, Elisabeth

;

;

Boccardi, Guillaume

;

Vertommen, Johan

;

Statistics

2129 since deposited on 2021-10-23

Acq. date: 2026-08-18