Comparison of InGaAs and InAIAs sacrificial layers for release of InP-based devices

O'Callaghan, J.; Loi, R.; Mura, E.E.; Roycroft, B.; Trindade, A.J.; Thomas, K.; Gocalinska, A.; Pelucchi, E.; Zhang, Jing; Roelkens, Gunther; Bower, C.A.; Corbett, B.

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Comparison of InGaAs and InAIAs sacrificial layers for release of InP-based devices

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2017

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Optical Materials Express

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Comparison of InGaAs and InAIAs sacrificial layers for release of InP-based devices

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