Publication:

Multi-trigger resist patterning with ASML NXE3300 EUV scanner

Date

2018

Proceedings Paper

Simple item page Full metadata Statistics

Files

37567.pdf 4.91 MB

Author(s)

Vesters, Yannick

;

McClelland, Alexandra

;

De Simone, Danilo

;

Popescu, Carmen

;

;

;

Theis, Wolfgang

;

Vandenberghe, Geert

;

Robinson, Alex P. G.

Statistics

2022 since deposited on 2021-10-26

Acq. date: 2026-06-02