Publication:

Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options

Date

2024
Proceedings Paper
https://doi.org/10.1109/iitc61274.2024.10732570
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Author(s)

Marti, Giulio  
;
Delie, Gilles  
;
Murdoch, Gayle  
;
Gupta, Anshul  
;
Kundu, Souvik  
;
Decoster, Stefan  
;
Varela Pedreira, Olalla  
;
Lesniewska, Alicja  
;
Hermans, Yannick  
;
Kenens, Bart  
;
Ulu Okudur, Fulya  
;
Park, Seongho  
;
Tokei, Zsolt  

Journal

N/A

Abstract

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195 since deposited on 2025-03-06
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Acq. date: 2026-08-21

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