Publication:

Improved resolution with main chain scission resists for EUV lithography

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2613445

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Author(s)

Shirotori, Akihide

;

Hoshino, Manabu

;

Rathore, Ashish

;

;

De Simone, Danilo

;

Vandenberghe, Geert

;

Matsumoto, Hirokazu

Journal

Proceedings of SPIE

Statistics

1220 since deposited on 2022-09-10

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Acq. date: 2026-08-20