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Electromigration behavior of 2μm sub-micron Cu/SiCN hybrid bonds

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3 since deposited on 2021-10-27
Acq. date: 2026-06-03

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2030 since deposited on 2021-10-27
Acq. date: 2026-06-03

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3 since deposited on 2021-10-27
Acq. date: 2026-06-03

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2030 since deposited on 2021-10-27
Acq. date: 2026-06-03

Citations